Photonic MEMS Devices: Design, Fabrication and Control, 1st Edition (Hardback) book cover

Photonic MEMS Devices

Design, Fabrication and Control, 1st Edition

By Ai-Qun Liu

CRC Press

502 pages | 368 B/W Illus.

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Hardback: 9781420045680
pub: 2008-09-04
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pub: 2018-10-08
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Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation.

An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes.

With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.

Table of Contents

MEMS Optical Switches and Systems

J. Li and A. Q. Liu

Design of MEMS Optical Switches

J. Li and A. Q. Liu

MEMS Thermo-Optic Switches

J. Li and T. Zhong

PHC Microresonators Dynamic Modulation Devices

S. T. Hwee Gee and A.Q. Liu

MEMS Variable Optical Attenuators

X. Zhang, H. Cai, and A.Q. Liu

MEMS Discretely Tunable Lasers

X. Zhang and H. Cai

MEMS Continuously Tunable Lasers

X. Zhang and A. Q. Liu

MEMS Injection-Locked Lasers

X. Zhang and A. Q. Liu

Deep Etching Fabrication Process

J. Li and A. Q. Liu

Deep Submicron Photonic Bandgap Crystal Fabrication Processes

S. H. G. Teo and A. Q. Liu

Control Strategies for Electrostatic MEMS Devices

B. Borovic and F. L. Lewis

Control of Optical Devices

B. Borovic and F. L. Lewis

About the Series

Optical Science and Engineering

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Subject Categories

BISAC Subject Codes/Headings:
SCIENCE / Optics
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics