Photosensitive Polyimides : Fundamentals and Applications book cover
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1st Edition

Photosensitive Polyimides
Fundamentals and Applications




ISBN 9781566762977
Published October 27, 1995 by CRC Press
328 Pages

 
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Book Description

This is the first book to provide an in-depth presentation of photosensitive polyimides for electronic and photonic applications. The authors are leading specialists in this field from Japan, Europe and the U.S.
From the Preface
Aromatic polyimides were developed originally as thermostable flexible polymer films for space applications. Now polyimides have found widespread use in the manufacture of electronic devices and have been employed in increasingly diverse areas of electronics and information technology. In addition to their excellent thermal stability and high processability, a wide range of chemical and physical properties provided by molecular engineering makes polyimides highly versatile in the electronics and information industries.
Lithography of polyimides is an inevitable process in using polyimides for microelectronic fields, and hence increasing research has been devoted to developing photosensitive polyimides, which make it unnecessary to use photoresists for patterning polyimides and diminishing markedly the number of steps in fabrication of various electronic devices.
In addition, the development of technology of photosensitive polyimides is expected to play a great role in manufacturing photonic devices in the near future, when the design and control of hyper fine structures . . . including higher thermal stability and better processability would be essential.

Table of Contents

Preface

Introduction to Photopolymers and Microelectronics

Introduction
Photosensitive Polymers
Polymers for Microelectronics
References


Applications of Polyimides in Electronics

Introduction
Commercially Available Photosensitive Polyimides
Performance of Commercial Photosensitive Polyimides Applications
Outlook
References


Thermal and Mechanical Properties of Polyimides and Control of High-Order Structures

Introduction
Thermal and Mechanical Properties of Aromatic Polyimides
Control of High-Order Structures of Aromatic Polyimides
References


Electronic Configuration of Polyimides and Their Photophysical Processes

Introduction
Color of Polyimide Films
Emission of Polyimide Films
Photophysical Processes in Polyimide Model Compounds
Photochemistry of Polyimide Model Compounds
Other Related Emission Behavior of Imide Compounds and Their Analogue Photoconductivity of Polyimide Films
References


Design of Photosensitive Polyimide Precursor Systems

Introduction
Structure and Reaction of Photosensitive Polyimide Precursors
Properties of Polyimides Formed from Photosensitive Polyimide Precursors
Conclusion
References


Intrinsically Photosensitive Polyimides

Introduction
Structure and Reaction of Intrinsically Photosensitive Polyimides
Photoreactivity
Mechanism and Molecular Design for Improvement of Photosensitive Polyimides References


Photosensitive Polyimides Based on Chemical Amplification Mechanism

Introduction
Amplification Process for Photosensitive Materials
Chemical Amplification
Synthesis of Polyimides Characteristics of Protected Polyimides 6F-t-BOC and 6F-THP Lithographic Performance of Protected Polyimides
Acidolytic Deprotection Rate in Film Matrices
Photochemical Reaction of PAG in Solid Films
Properties of 6F-t-BOC and 6F-THP
References


Electron Beam Lithography of Polyimides

Introduction
Characteristics of Radiation Effects of Polyimides
Molecular Design of Electron-Beam Sensitive Polyimides
Mechanism of Electron-Beam Irradiation of Polyimides
References


Processing of Polyimides and Related Topics

Introduction
Representative Electronic Applications Deposition Methods
Patterning of Conventional Polyimides Processing of Photosensitive Polyimides
Processes for High-Density Multilevel Metallization
References


Applications of Polyimides to Photonic Devices

Introduction
Nonlinear Optical Phenomena
Organic versus Inorganic Nonlinear Optical Materials
EO Effect in Polymers and Use for Devices
Requirements for Polymers in Photonics Polyimide-Based EO Devices
NLO Chromophore Requirements for Use in EO Polymer Devices
Photosensitive Polyimides in Photonics Higher Levels of Integration: Advantages of Polymers
Summary
References



39 Tables, 208 Figures
Numerous tables and graphs provide extensive quantitative data on polyimides for electronic applications. The many schematics and micrographs illustrate materials, processes and devices. Here is a small sampling.
Tables: Patterning and thermal properties of commercially available photosensitive polyimides
Mechanical and electrical properties of commercially available photosensitive polyimides
Chemical structures of commercially available polyimide films
Required properties of photosensitive poyimides
Applications of polyimide for electronic devices
Materials requirements for EO polymer devices

Micrographs: Memory devices on a silicon wafer, the cell arrays are protected by thick polyimide patterns
Layout of a liquid crystal display with polyimide alignment layers
SEM picture of line and space pattern formed with 6F-THP

Schematics: Chemical principle and processing steps for direct production of PI-patterns
Polyimide patterning processes
High temperature post-exposure process using photosensitive polyimide precursors
Comparison of polyimide patterning processes between polyimides with and without photosensitivity
Process flow for planarization with lift-off technique
Examples of applications for polymers in photonic systems

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