Photosensitive Polyimides: Fundamentals and Applications, 1st Edition (Hardback) book cover

Photosensitive Polyimides

Fundamentals and Applications, 1st Edition

By Takashi Yamashita

CRC Press

328 pages

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Hardback: 9781566762977
pub: 1995-10-27
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Description

This is the first book to provide an in-depth presentation of photosensitive polyimides for electronic and photonic applications. The authors are leading specialists in this field from Japan, Europe and the U.S.

From the Preface

Aromatic polyimides were developed originally as thermostable flexible polymer films for space applications. Now polyimides have found widespread use in the manufacture of electronic devices and have been employed in increasingly diverse areas of electronics and information technology. In addition to their excellent thermal stability and high processability, a wide range of chemical and physical properties provided by molecular engineering makes polyimides highly versatile in the electronics and information industries.

Lithography of polyimides is an inevitable process in using polyimides for microelectronic fields, and hence increasing research has been devoted to developing photosensitive polyimides, which make it unnecessary to use photoresists for patterning polyimides and diminishing markedly the number of steps in fabrication of various electronic devices.

In addition, the development of technology of photosensitive polyimides is expected to play a great role in manufacturing photonic devices in the near future, when the design and control of hyper fine structures . . . including higher thermal stability and better processability would be essential.

Table of Contents

Preface

Introduction to Photopolymers and Microelectronics

Introduction

Photosensitive Polymers

Polymers for Microelectronics

References

Applications of Polyimides in Electronics

Introduction

Commercially Available Photosensitive Polyimides

Performance of Commercial Photosensitive Polyimides Applications

Outlook

References

Thermal and Mechanical Properties of Polyimides and Control of High-Order Structures

Introduction

Thermal and Mechanical Properties of Aromatic Polyimides

Control of High-Order Structures of Aromatic Polyimides

References

Electronic Configuration of Polyimides and Their Photophysical Processes

Introduction

Color of Polyimide Films

Emission of Polyimide Films

Photophysical Processes in Polyimide Model Compounds

Photochemistry of Polyimide Model Compounds

Other Related Emission Behavior of Imide Compounds and Their Analogue Photoconductivity of Polyimide Films

References

Design of Photosensitive Polyimide Precursor Systems

Introduction

Structure and Reaction of Photosensitive Polyimide Precursors

Properties of Polyimides Formed from Photosensitive Polyimide Precursors

Conclusion

References

Intrinsically Photosensitive Polyimides

Introduction

Structure and Reaction of Intrinsically Photosensitive Polyimides

Photoreactivity

Mechanism and Molecular Design for Improvement of Photosensitive Polyimides References

Photosensitive Polyimides Based on Chemical Amplification Mechanism

Introduction

Amplification Process for Photosensitive Materials

Chemical Amplification

Synthesis of Polyimides Characteristics of Protected Polyimides 6F-t-BOC and 6F-THP Lithographic Performance of Protected Polyimides

Acidolytic Deprotection Rate in Film Matrices

Photochemical Reaction of PAG in Solid Films

Properties of 6F-t-BOC and 6F-THP

References

Electron Beam Lithography of Polyimides

Introduction

Characteristics of Radiation Effects of Polyimides

Molecular Design of Electron-Beam Sensitive Polyimides

Mechanism of Electron-Beam Irradiation of Polyimides

References

Processing of Polyimides and Related Topics

Introduction

Representative Electronic Applications Deposition Methods

Patterning of Conventional Polyimides Processing of Photosensitive Polyimides

Processes for High-Density Multilevel Metallization

References

Applications of Polyimides to Photonic Devices

Introduction

Nonlinear Optical Phenomena

Organic versus Inorganic Nonlinear Optical Materials

EO Effect in Polymers and Use for Devices

Requirements for Polymers in Photonics Polyimide-Based EO Devices

NLO Chromophore Requirements for Use in EO Polymer Devices

Photosensitive Polyimides in Photonics Higher Levels of Integration: Advantages of Polymers

Summary

References

39 Tables, 208 Figures

Numerous tables and graphs provide extensive quantitative data on polyimides for electronic applications. The many schematics and micrographs illustrate materials, processes and devices. Here is a small sampling.

Tables: Patterning and thermal properties of commercially available photosensitive polyimides

Mechanical and electrical properties of commercially available photosensitive polyimides

Chemical structures of commercially available polyimide films

Required properties of photosensitive poyimides

Applications of polyimide for electronic devices

Materials requirements for EO polymer devices

Micrographs: Memory devices on a silicon wafer, the cell arrays are protected by thick polyimide patterns

Layout of a liquid crystal display with polyimide alignment layers

SEM picture of line and space pattern formed with 6F-THP

Schematics: Chemical principle and processing steps for direct production of PI-patterns

Polyimide patterning processes

High temperature post-exposure process using photosensitive polyimide precursors

Comparison of polyimide patterning processes between polyimides with and without photosensitivity

Process flow for planarization with lift-off technique

Examples of applications for polymers in photonic systems

Subject Categories

BISAC Subject Codes/Headings:
TEC021000
TECHNOLOGY & ENGINEERING / Material Science
TEC055000
TECHNOLOGY & ENGINEERING / Textiles & Polymers