342 Pages
by
CRC Press
342 Pages
179 B/W Illustrations
by
CRC Press
342 Pages
179 B/W Illustrations
by
CRC Press
Also available as eBook on:
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the... Read more
Foreword
Introduction
Abbreviations
1. Main physical properties and characteristics of radiofrequency capacitive discharge
2. Physical properties of near-electrode layers of space charge of RF capacitive discharge
3. Edge effects in the RF capacitive discharge
4. Near-electrode electron beams in RF capacitive discharge
5. Physical properties of RF gas discharge plasma
References
Index
Biography
V. P. Savinov
