Radio-Frequency Capacitive Discharges: 1st Edition (Hardback) book cover

Radio-Frequency Capacitive Discharges

1st Edition

By Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko

CRC Press

304 pages

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Hardback: 9780849386442
pub: 1995-02-24
$335.00
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pub: 2017-12-14
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Description

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings.

Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.

Table of Contents

Basic Principals of the RF Capacitive Discharge

Excitation of an RF Discharge

Electron Motion in an Oscillating Electric Field

Electrodynamic Plasma Characteristics and Interaction with Oscillating Field

Electron Production and Loss: Plasma Maintenance

A Simplified Model of the RF Discharge

Constant Positive Plasma Potential

Stochastic Heating of Electrons

RF Discharge Modes

Moderate-Pressure RF Discharge

Space Charge Sheaths

Experimental Current-Voltage Characteristics

CVC and Normal Current Densities in the a-Discharge (Theory and Numerical Simulation)

The a-g Transition Parameters

The y-Discharge

The a-g Transition at Moderate and Low Pressures

Coexistence of Two RF Modes in the Gap

High-Pressure RF Capacitive Discharges

RF Discharge with Coated Electrodes

Low-Pressure RF Discharges and Asymmetry Effects

Self-Bias in an Asymmetric Capacitively Coupled Discharge

Correlations Between Plasma and Sheath Parameters in an Ambipolar Diffusion-Controlled Discharge

Sheath Dynamics and Current Anharmonicity in an Asymmetric Discharge

Current Anharmonicity in Asymmetric and Symmetric Discharges

Battery Effect in an Asymmetric Discharge

Plasma 'Nontransparency' and Fast Electron Response to RF Field and 'Oscillationless' Sheath Ions

The Floating Potential

The a-Sheath

The Energy Spectrum of Ions Bombarding the Electrode Surface

RF Discharge in Electronegative Gases

Smooth a-g Transition and the g Mode

Some Aspects of Stochastic Heating of Electrons

Numerical Simulation of Low-Pressure RF Discharges

Magnetron RF Discharge

Experimental Methods and Measurements

Voltage Measurements and Current-Voltage Characteristics

Probe Measurement of Constant Space and Plasma Potentials

Active DC Probing of an RF Discharge

A Method for Studying the Transverse Discharge Structure

Optical Methods for the Study of Spatial Discharge Structure

Laser-Induced Fluorescence and Laser-Optogalvanic Spectroscopy

Excitation and Control of an RF Discharge

Application of RF Capacitive Discharges for Gas Laser Excitation and Plasma Technology

RF Discharge and Gas Lasers: A Brief History

Arguments in Favor of RF Laser Excitation

Frequency Dependence of Discharge and Active Laser Medium Parameters

Selection of Designs and Parameters of Transverse RF-Excited CO2 Lasers with Diffusional Cooling

Optical Resonators of Waveguide and Slab RF CO2 Lasers

High Flowrate CO2 Lasers Excited by RF and Combined RF-DC Discharges

Lasers with Alternative Active Media

Magnetic Stabilization of Slab Discharges

Plasmachemical Technology

References

Index

Subject Categories

BISAC Subject Codes/Headings:
SCI013050
SCIENCE / Chemistry / Physical & Theoretical
SCI055000
SCIENCE / Physics