Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters discusses radio frequency microelectromechanical systems (RF MEMS)-based control components and will be useful for researchers and R&D engineers. It offers an in-depth study, performance analysis, and extensive characterization on micromachined switches and phase shifters. The reader will learn about basic design methodology and techniques to carry out extensive measurements on MEMS switches and phase shifters which include electrical, mechanical, power handling, linearity, temperature stability, reliability, and radio frequency performance. Practical examples included in the book will help readers to build high performance systems/subsystems using micromachined circuits.
Introduction to Micro Electro Mechanical Systems. Behavioral Study of Micromachined Contact Switch. Single-Pole Multi-Throw (SPMT) MEMS switching networks. Lateral MEMS Switch and Switching Networks. Micromachined Microwave Phase Shifters. Digital MEM Switched Line Phase Shifters. DMTL Phase Shifter design using MAM capacitors and MEMS bridges. Push-Pull Type Micromachined Phase Shifter. Reconfigurable Micromachined Phase Shifter Using Push-Pull Actuators. Multi-frequency MEMS Phase Shifters. Reliability and power handling of MEMS switches and Phase Shifters. MEMS 3-and 4-bit Phase Shifters using two back-to-back Switching Networks. Digital MEMS Phase Shifters using combination of Switched-line and DMTL Topologies. Packaging and Integrated Technologies.