138 Pages
by
CRC Press
138 Pages
by
CRC Press
Also available as eBook on:
This volume is devoted to the physics, instrumentation and analytical methods of secondary ion mass spectroscopy (SIMS) in relation to solid surfaces.
It describes modern models of secondary ion formation and the factors influencing sensitivity of measurements and the range of applications. All the main parts of SIMS instruments are discussed in detail. Emphasising practical applications the... Read more
Preface
CHAPTER 1. PHYSICS OF SECONDARY ION EMISSION
Parameters of secondary ion emission
Effect of the primary ion energy and current on SIE
Effect of the target temperature on the SIE coefficient
Angular dependence of secondary ion emission
Secondary ion energy distribution
Effect of primary ions and target material on secondary ion yield
Effect of sample oxidation on SIE
Polyatomic ion emission
Mechanism of ionization of ejected atoms
References
CHAPTER 2. SIMS INSTRUMENTATION
Ion sources
Mass separation of primary beam
Primary and secondary ion optics
Mass spectrometers
Ion detection and vacuum systems
Mass-spectral microscopes
Ion microprobes
References
CHAPTER 3. CONSTITUTIONAL ANALYSIS OF SOLIDS BY SIMS
Analytical characteristics of SIMS
Qualitative constitutional analysis
Physical background of quantitative analysis
Methods of quantitative analysis
Analysis of organic and biological samples
Standards and cross-calibration of instruments
References
CHAPTER 4. IN-DEPTH ANALYSIS
Technique of SIMS in-depth analysis
Study of thin films (vacuum condensates)
In-depth analysis of implantation profiles
Spatially multidimensional SIMS analysis
References
CHAPTER 5. STUDY OF PROCESSES AT THE SURFACE
Adsorption and catalysis
Investigation of metal oxidation
Comparison of SIMS with other methods of surface analysis
References
Index
Biography
V. Cherepin
