212 Pages
by
CRC Press
216 Pages
by
CRC Press
Also available as eBook on:
Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given... Read more
SEMICONDUCTOR AND WAFER MANUFACTURING FACILITIES
Wafer Fab Layout
Facility-Support Operations
Semiconductor Process Equipment
EXHAUST TYPES AND CHALLENGES
Exhaust Types
Exhaust Management Challenges
POINT-OF-USE DEVICES AND EXHAUST-LINE REQUIREMENTS
Point-Of-Use Device Information
Surrounding Exhaust-Line Requirements
Examples of Point-Of-Use Devices for Selected Processes
Fab Examples of Point-Of-Use Devices
Developing a Point-Of-Use Device and Surrounding Exhaust-Line Strategy
"Development Opportunities" for Point-Of-Use Devices
CENTRALIZED SCRUBBERS
Introduction
General Design and Operation
General Operation Information
Acid Scrubbers for Large Storage Tanks of Concentrated Acid Solution
Centralized Abatement Systems for Higher Inlet Concentrations of Acid Compounds, Chlorine, and Acid Mists
Centralized Scrubbing System for Oxides of Nitrogen
Specifying a Centralized Wet Scrubber
CENTRALIZED EQUIPMENT TO CONTROL VOLATILE ORGANIC COMPOUNDS
Introduction
Centralized Equipment Technologies to Control Volatile Organic Compounds
Examples of Selection Criteria for Centralized Equipment to Control Volatile Organic Compounds
Location of Fans
Testing of Centralized Equipment to Control Volatile Organic Compounds
Specification to Supplier of Centralized Equipment to Control Volatile Organic Compounds
EMERGENCY RELEASES
Introduction
Controlling Releases from Gas Cylinders or Other Vessels
Silane Emergency Release
Reduction of Emergency Release of Concentrations of Stack Discharge
EXHAUST MANAGEMENT AND AIR ABATEMENT EQUIPMENT EXAMPLES
List of Examples
Example No. 7-1
Example No. 7-2
Example No. 7-3
Example No. 7-4
Example No. 7-5
List of Acronyms
Wafer Fab Layout
Facility-Support Operations
Semiconductor Process Equipment
EXHAUST TYPES AND CHALLENGES
Exhaust Types
Exhaust Management Challenges
POINT-OF-USE DEVICES AND EXHAUST-LINE REQUIREMENTS
Point-Of-Use Device Information
Surrounding Exhaust-Line Requirements
Examples of Point-Of-Use Devices for Selected Processes
Fab Examples of Point-Of-Use Devices
Developing a Point-Of-Use Device and Surrounding Exhaust-Line Strategy
"Development Opportunities" for Point-Of-Use Devices
CENTRALIZED SCRUBBERS
Introduction
General Design and Operation
General Operation Information
Acid Scrubbers for Large Storage Tanks of Concentrated Acid Solution
Centralized Abatement Systems for Higher Inlet Concentrations of Acid Compounds, Chlorine, and Acid Mists
Centralized Scrubbing System for Oxides of Nitrogen
Specifying a Centralized Wet Scrubber
CENTRALIZED EQUIPMENT TO CONTROL VOLATILE ORGANIC COMPOUNDS
Introduction
Centralized Equipment Technologies to Control Volatile Organic Compounds
Examples of Selection Criteria for Centralized Equipment to Control Volatile Organic Compounds
Location of Fans
Testing of Centralized Equipment to Control Volatile Organic Compounds
Specification to Supplier of Centralized Equipment to Control Volatile Organic Compounds
EMERGENCY RELEASES
Introduction
Controlling Releases from Gas Cylinders or Other Vessels
Silane Emergency Release
Reduction of Emergency Release of Concentrations of Stack Discharge
EXHAUST MANAGEMENT AND AIR ABATEMENT EQUIPMENT EXAMPLES
List of Examples
Example No. 7-1
Example No. 7-2
Example No. 7-3
Example No. 7-4
Example No. 7-5
List of Acronyms
Biography
J. Michael Sherer
