Fourteen years of experience in micro-nano-fabrication, electron-beam lithography, focused ion beam lithography, nanoimprinting, thin-film deposition and plasma etch. Experience in nanophotonics, plasmonics fabrication and characterization, semiconductor, optical and nanomechanical device fabrication, and the development of new lithographic tools and processes. Recently he is focused on the so called Single Digit Nano Fabrication, or exact fabrication of nanostructures with dimensions below 10 n
BiographyJune 2006 to now: Facility Director for the nanofabrication facility at Molecular Foundry Lawrence Berkeley National Laboratory (The Molecular Foundry is one of five Nanoscale Science Research Centers (NSRCs), national user facilities for interdisciplinary research at the nanoscale, supported by the Department of Energy (DOE) Office of Science). The Foundry’s Nanofabrication Facility is equipped with state-of-the-art equipment for lithographic and pattern transfer processes. Research efforts in the Nanofabrication Facility are devoted to use biological and organic templates, advanced lithographies and probe-based surface modification to fabricate nanoscale structures, features and spaces that measure less than 10 nanometers. That is applied to the development of nanoelectronic, nanomagnetic and nanophotonic devices.
February 2006: Staff Scientist at Lawrence Berkeley National Laboratory - Molecular Foundry in the nanofabrication group in charge of the Electron Beam Lithography, Focused Ion Beam Lithography processes and developments. Responsible for the clean room activities of Molecular Foundry. Involved in the nanophotonic research activities.
September 2003 - 2006. Senior Scientist (Primo ricercatore) at INFM TASC institute (Istituto Nazionale Fisica Della Materia) at ELETTRA Synchrotron Light Source of Trieste Italy. Nanolithography and nanofabrication with advanced techniques including focused ion-beam, electron beam, focused electron and ion induced deposition, proximity X-ray, nano-imprinting and optical lithography. Fields of application: diffractive optics, nano-photonics and Photonic Crystals, optics for X-Ray Microscopy, biomedical devices, sensors, magnetic devices.
2005: Visiting Professor, Perugia University (Italy) for “Nanostructure and surface physics”
2004: Visiting Professor, Venezia University Master degree for “Nano-Optics and nano-Devices”
September 2001 – August 2003. Senior researcher at Sincrotrone Triese ScpA . Involved in the LILIT beamline (Laboratories for Interdisciplinar LIThography) and in Deep X-Ray Lithography beamline activities at the ELETTRA Synchrotron light source Trieste Italy.
January 1999 –June 2001: Researcher at CNR Istituto di Elettronica dello Stato Solido (IESS) of Rome Italy at the micro-fabrication group. Manager of the electron beam lithography system and stepper system for X-ray lithography; X-ray optics and nano-engineering researcher. Responsible of the project “Industrial application of proximity X-ray lithography” made in collaboration with INFM and Sincrotrone Trieste spa.
1998 -2003: Founded a company (AwareX S.r.l.) for the applications of new technology in various fields. AwareX applies new optical technologies to archaeological and monumental environments.
June 1996 – December 1997: Post-doc Fellowship at the IOTA, « Institut d’Optique Théorique et Appliquée », Orsay France on « X-Ray holographic microscopy » project. Advisor: Dr D. Joyeux - IOTA, Orsay, France.
February 1995 - February 1996: Researcher at the robotics laboratories of the ENEA Casaccia (Rome). The goal of this work was the realisation of a «high level SoftWare and HardWare system for an automatic industrial machine able to bend and to prepare iron sheets for big ships».
January 1993 - January 1995: Post graduated fellowship at the TELA (LAser TEchnology) laboratories of the C.R.E. ENEA Frascati, studying "laser sensor for advanced robotics". Advisors: Dr L. Bartolini - C.R.E. ENEA Frascati (Rome). Ing F. Andreucci - Dune s.p.a. Rome.
1989 – 1992: Participation in the experimental and theoretical activities of the FEL (Free Electron Laser) project, at the "high power laser laboratories", C.R.E. ENEA Frascati (Rome) Italy. Advisors: Dr G. Dattoli - C.R.E. ENEA Frascati (Rome)
Laurea degree in Physics at University of Rome La Sapienza 1991
Areas of Research / Professional Expertise
nanofabrication, nanophotonics, optics