Introduction to Optical Metrology: 1st Edition (Hardback) book cover

Introduction to Optical Metrology

1st Edition

By Rajpal S. Sirohi

CRC Press

449 pages | 284 B/W Illus.

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pub: 2015-08-20
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Description

Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by introducing the subject of optics, and then addresses the propagation of laser beams through free space and optical systems. After explaining how a Gaussian beam propagates, how to set up a collimator to get a collimated beam for experimentation, and how to detect and record optical signals, the text:

  • Discusses interferometry, speckle metrology, moiré phenomenon, photoelasticity, and microscopy
  • Describes the different principles used to measure the refractive indices of solids, liquids, and gases
  • Presents methods for measuring curvature, focal length, angle, thickness, velocity, pressure, and length
  • Details techniques for optical testing as well as for making fiber optic- and MEMS-based measurements
  • Depicts a wave propagating in the positive z-direction by ei(ωt – kz), as opposed to ei(kz – ωt)

Featuring exercise problems at the end of each chapter, Introduction to Optical Metrology provides an applied understanding of essential optical measurement concepts, techniques, and procedures.

Reviews

"A good book for students and professionals to learn both basic and practical aspects of optical metrology."

—Mitsuo Takeda, Center for Optical Research and Education, Utsunomiya University, Japan

"The theory and practice of optical metrology is equally weighted in this book, an ideal combination for the instructor, student, and researcher."

—Ramen Bahuguna, San Jose State University, California, USA

"The author’s way of writing/explaining is very well adapted to students and practical-thinking persons. The didactics show the long experience of the author."

—W. Osten, University Stuttgart, Germany

Table of Contents

Introduction to Optics

Introduction

Law of Reflection

Law of Refraction

Interference

Diffraction

Polarization

Fresnel Equations

Thin Film Optics

Optical Components

Refraction at Curved Interface

Paraxial Optics

Problems

Laser Beams

Gaussian Beams

The ABCD Law for Gaussian Beams

Laser Collimator

Vortex Beams

Bessel Beams

Problems

Sources, Detectors, and Recording Media

Introduction

Radiometric Units

Blackbody

Light Sources

Detectors

Recording Media

Image Detectors

Spatial Light Modulators

Problems

Interferometry

Introduction

Early History

Generation of Coherent Waves/Sources

Fringe Patterns

Some More Interferometers

Phase Shifting

Problems

Techniques

Holography and Hologram Interferometry

Speckle Phenomenon, Speckle Photography, and Speckle Interferometry

The Moiré Phenomena

Photoelasticity

Microscopy

Problems

Measurement of Refractive Index

Introduction

Spectrometer

Goniometer

Methods Based on the Measurement of Critical Angle

Measurement of Brewster Angle

Ellipsometry

Spectral Transmission Measurement

Interferometry

Problems

Measurement of Radius of Curvature and Focal Length

Introduction

Measurement of Radius of Curvature

Scanning Profilometry

Radius of Curvature Measurement by Talbot Interferometry

Measurement of Focal Length

Moiré Deflectometry

Problems

Optical Testing

Testing of a Flat Surface

Testing of Spherical Surfaces

Testing of Aspherical Surfaces

Oblique Incidence Interferometer

Shear Interferometry

Long Wavelength Interferometry

Problems

Angle Measurement

Definition of an Angle

Autocollimator

Goniometer

Interferometry

Problems

Thickness Measurement

Triangulation-Based Probe

Spectral Reflectometry

Ellipsometry

Interferometry

Low Coherence Interferometry

Confocal Microscopy

Light Section Microscopy

Problems

Measurement of Velocity

Introduction

Scattering from a Moving Particle-Doppler Shift

Scatter Light Beams Anemometry

Multichannel LDA Systems

Signal Processing

Particle Image Velocimetry

Measurement of Very High Velocity

Problems

Pressure Measurement

Pressure Sensitive Paint

Measurement of Pressure with Photoelastic Material

Ruby Pressure Standard

Fabry-Perot Etalon as Pressure Sensor

Problems

Fiber Optic- and MEM-Based Measurements

Introduction

Intensity Modulation

Phase Modulation

Pressure Sensor: Membrane Type

Bragg Grating Sensors

Polarization Maintaining Single-Mode Fibers

Fiber Optic Biosensors

Problems

Length Measurement

Introduction

Measurement of Gauge Blocks and Slip Gauges

Gauge Block Interferometry: Comparison with a Standard

Comb Generation and Gauge Block Calibration

Modulated Frequency-Displacement Sensor

Displacement Measurement with Interferometry

Angle Interferometer

The Moiré Technique for Displacement Measurement

Displacement Distribution Measurement

Moiré Techniques

Digital Image Correlation

Problems

About the Author

Rajpal S. Sirohi, Ph.D, is currently chair professor of the Physics Department at Tezpur University, India, and senior editor of Optical Engineering. Previously, he was director of the Indian Institute of Technology Delhi; vice-chancellor of Barkatullah University, Bhopal; vice-chancellor of Shobhit University, Meerut; and vice-chancellor of Amity University, Jaipur. He also served in various capacities at the Indian Institute of Science, Bangalore; Indian Institute of Technology Madras, Chennai; Case Western Reserve University, Cleveland, Ohio, USA; Rose-Hulman Institute of Technology, Terre Haute, Indiana, USA; Institute for Advanced Studies, University of Malaya, Malaysia; University of Namibia; National University of Singapore; and École Polytechnique Fédérale de Lausanne, Switzerland. Widely published and highly decorated, Professor Sirohi is or has been a fellow, honorary fellow, invited fellow, member, board member, and former president of numerous scientific academies, associations, committees, societies, and journals.

About the Series

Optical Sciences and Applications of Light

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Subject Categories

BISAC Subject Codes/Headings:
TEC019000
TECHNOLOGY & ENGINEERING / Lasers & Photonics
TEC064000
TECHNOLOGY & ENGINEERING / Sensors