1st Edition
Kinetic Studies in GeO2/Ge System A Retrospective from 2021
By Sheng-Kai Wang
Copyright 2022
156 Pages
102 B/W Illustrations
by
CRC Press
156 Pages
102 B/W Illustrations
by
CRC Press
156 Pages
102 B/W Illustrations
by
CRC Press
Also available as eBook on:
Kinetic Studies in GeO 2 /Ge System: A Retrospective from 2021 investigates reaction kinetics in GeO 2 /Ge systems, aiming to demonstrate the fundamentals of the GeO 2 /Ge interface and to give insight into the distinctive features and performance of Ge (germanium) applied to advanced complementary metal oxide semiconductor (CMOS) devices.
This book first reviews the development of MOS... Read more
1. Introduction 2. Fabrication and Characterization Methods 3. Desorption Kinetics of GeO from GeO2/Ge 4. Structural Transition Kinetics in GeO2/Ge 5. Oxidations in GeO2/Ge Stack
Biography
Sheng-Kai Wang is a professor in the Institute of Microelectronics at the Chinese Academy of Sciences (IMECAS), China, and Director General of the Youth Innovation Promotion Association of IMECAS. He has been engaged in Ge, III-V, and SiC in MOS technology for years and has published more than 100 papers and authorized more than 40 patents.
