1st Edition

MEMS and NEMS Systems, Devices, and Structures

By Sergey Edward Lyshevski Copyright 2002
    461 Pages 151 B/W Illustrations
    by CRC Press

    The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.

    MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

    The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

    Overview and Introduction
    New Trends in Engineering and Science: Micro- and Nanoscale Systems
    Introduction to Design of MEMS and NEMS
    Biological and Biosystems Analogies
    Overview of Nano- and Microelectromechanical Systems
    Applications of Micro- and Nanoelectromechanical Systems
    Micro- and Nanoelectromechanical Systems
    Synergetic Paradigms in MEMS
    MEMS and NEMS Architecture
    Fundamentals of MEMS Fabrication
    Introduction and Description of Basic Processes
    Microfabrication and Micromachining of ICs, Microstructures, and Microdevices
    Devising and Synthesis of MEMS AND NEMS
    MEMS Motion Microdevices Classifier and Synthesis
    Nanoelectromechanical Systems
    Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures
    Introduction to Modeling, Analysis, and Simulation
    Electromagnetics and its Application for MEMS and NEMS
    Induction Micromachines
    Synchronous Microtransducers
    Microscale Permanent-Magnet Stepper Micromotors
    Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices
    Classical Mechanics and its Application
    Thermoanalysis and Heat Equation
    Nanosystems, Quantum Mechanics, and Mathematical Models
    Atomic Structures and Quantum Mechanics
    Molecular and Nanostructure Dynamics
    Molecular Wires and Molecular Circuits
    Control of Microelectromechanical Systems
    Introduction to Microelectromechanical Systems Control
    Lyapunov Stability Theory
    Control of Microelectromechanical Systems
    Intelligent Control of MEMS
    Hamilton-Jacobi Theory and Quantum Mechanics
    Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS
    Design and Fabrication
    Analysis of Translational Microtransducers
    Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control
    Three-Phase Synchronous Reluctance Micromotors
    Magnetization Dynamics of Thin Films
    Microstructures and Microtransducers With Permanent Magnets: Micromirror Actuators
    Reluctance Electromagnetic Micromotors
    Micromachined Polycrystalline Silicon Carbide Micromotors
    Axial Electromagnetic Micromotors
    Synergetic Computer-Aided Design of MEMS

    Each chapter also includes a References section.

    Keywords: Nanoscience, Nanotechnology


    Sergey Edward Lyshevski

    "This book … provides an excellent introduction to MEMS and NEMS systems, devices, structures, and fabrication. …its main strength is in the mathematical models derived for the various devices covered in the text. …[It includes] a good overview of practical technology currently in use. …The book is an excellent place to begin studying MEMS and NEMS."
    -IEEE Electrical Insulation Magazine, Vol. 20, No. 4, July/Aug. 2004