Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition, 2nd Edition (Hardback) book cover

Nano- and Micro-Electromechanical Systems

Fundamentals of Nano- and Microengineering, Second Edition, 2nd Edition

By Sergey Edward Lyshevski

CRC Press

744 pages | 16 Color Illus. | 283 B/W Illus.

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Hardback: 9780849328381
pub: 2005-01-11
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pub: 2018-10-03
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Description

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.

Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

Reviews

“The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…”

—Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12

"This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter."

– In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3

Table of Contents

NANOTECHNOLOGY AND MICROTECHNOLOGY (NANO- AND MICRO- SCIENCE, ENGINEERING AND TECHNOLOGY), AND BEYOND

Introduction and Overview: From Micro- to Nano- and Beyond to Stringo-Scale

Introductory Definitions to the Subjects

Current Developments and Needs for Coherent Revolutionary Developments

Societal Challenges and Implications

NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES

Sizing Features: From Micro- to Nano-, and from Nano- to Stringo-Scale MEMS and NEMS Definitions

Introduction to Taxonomy of Nano- and Microsystem Synthesis and Design

Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain

NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION

Biomimetics, Biological Analogies,and Design of NEMS and MEMS

Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling

MEMS Examples and MEMS Architectures

Introduction to Microfabrication and Micromachining

FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES

Introduction and Description of Basic Processes in Microfabrication

Microfabrication and Micromachining of ICs, Microstructures, and Microdevices

MEMS Fabrication Technologies

DEVISING AND SYNTHESIS OF NEMS AND MEMS

Motion Nano- and Microdevices: Synthesis and Classification

Microaccelerometers as Microelectromechanical Microdevices

Optimization with Application to Synthesis and Classification Solver

Nanoengineering Bioinformatics and Its Application

MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES

Introduction to Modeling, Analysis, and Simulation

Basic Electromagnetics with Applications to MEMS and NEMS

Model Developments of Micro- and Nanoactuators Using Electromagnetics

Classical Mechanics and Its Application to MEMS

Equations of Motions

Direct-Current Micromachines

Simulation of MEMS in the MATLAB Environment with Examples

Induction Micromachines

Synchronous Micromachines

Permanent-Magnet Stepper Micromotors

Piezotransducers

Modeling of Electromagnetic Radiating Energy Microdevices

Thermodynamics, Thermoanalysis, and Heat Equation

QUANTUM MECHANICS AND ITS APPLICATIONS

Atomic Structures and Quantum Mechanics

Molecular and Nanostructure Dynamics

Quantum Mechanics and Energy Bands

MOLECULAR AND CARBON NANOELECTRONICS

Past, Current, and Future of Electronics with Prospects for 2020 and Beyond

Fundamentals

Carbon Nanotubes

Carbon-Based Nanoelectronics and Three-Dimensional Nano-ICs

CONTROL OF MEMS AND NEMS

Continuous-Time and Discrete-Time MEMS

Analog Control of MEMS Using Transfer Functions

The Hamilton-Jacobi Theory and Optimal Control of MEMS and NEMS

Sliding Mode Control of MEMS and NEMS

Constrained Control of Nonlinear MEMS and NEMS

Optimization of Microsystems Using Nonquadratic Performance Functionals

Hamilton-Jacobi Theory and Quantum Mechanics

Lyapunov Stability Theory in Analysis and Control of MEMS and NEMS

Digital Control of MEMS and NEMS

EXAMPLES IN SYNTHESIS, ANALYSIS, DESIGN AND FABRICATION OF MEMS

Introduction

Analysis of Energy Conversion and MEMS Performance from Materials and Fabrication Viewpoints

Analysis of Translational Microtransducers

Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control

Microfabrication Topics

Magnetization Dynamics of Thin Films

Microstructures and Microtransducers with Permanent-Magnet: Micromirror Actuators

Reluctance Electromagnetic Micromotors

Micromachined Polycrystalline Silicon Carbide Micromotors

Axial Electromagnetic Micromotors

Cognitive Computer-Aided Design of MEMS

Subject Categories

BISAC Subject Codes/Headings:
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC027000
TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS