1st Edition

Nanofabrication by Ion-Beam Sputtering Fundamentals and Applications

Edited By Tapobrata Som, Dinakar Kanjilal Copyright 2013
    372 Pages 28 Color & 124 B/W Illustrations
    by Jenny Stanford Publishing

    Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attractive. This book reviews various fascinating results, understand the underlying physics of ion induced pattern formation, to highlight the potential applications of the patterned surfaces, and to explore the patterning behavior by different irradiation parameters in order to create desired surface morphologies on specific materials.

    Elements of Sputtering Theory, Peter Sigmund
    General aspects
    High-energy cascade dynamics
    Low-energy dynamics
    Concluding remarks

    Sputter-Ripple Formation on Flat and Rough Surfaces – A Case Study with Si, S.A. Mollick and D. Ghose
    Mechanisms of pattern formation
    Sample preparation and analysis
    Results and discussion

    Low Energy Ion Induced Pattern Formation in Si-Ge Alloy, Subhendu Sarkar
    Theoretical aspects
    Patterning of alloy surfaces
    Studies on SiGe surfaces
    Ion beam effects
    Conclusion and outlook

    Patterning of Ionic Insulator Surfaces with Low Energy Ion Beams, Franciszek Krok, Salah R. Saeed, Marek Kolmer, and Marek Szymonski
    Remarks on experimental details
    Surface morphology changes at the initial stages of ion bombardment
    Ripple formation for prolonged irradiation with off normal incidence ion beam
    Temperature dependent patterning of ionic single crystal surfaces
    Electronic versus ballistic processes on ion irradiated ionic surfaces
    Concluding remarks

    Nanostructures of Thin Films by keV Ion Beams, Prasanta Karmakar
    Variation of surface patterns
    Origin of ion induced nanostructure formation
    Dependence on local ion impact angle
    Spatially resolved magnetic and electric zone formation
    Coulomb explosion sputtering of spatially oxidized nanostructures

    Surface Nanopatterns on Si(100) by Normal-Incidence Ion Sputtering with Metal Incorporation, Raúl Gago, José A. Sánchez-García, Andrés Redondo-Cubero, and Luis Vázquez
    Nanopattern formation with a cold-cathode ion source
    Role of metal incorporation on the pattern selectivity
    On the mechanism of pattern selectivity and outlook

    Kinetic Monte Carlo Simulations of Low Energy Ion-Induced Surface Patterning, Wai-Lun Chan and Eric Chason
    KMC model
    Ripples formation in the linear instability regime
    Dependence of ripple wavelength on temperature and ion flux
    Barrier for ripples formation in the low flux and high temperature regime
    Effect of multiple defects

    From Cascades to Patterns: A Monte Carlo Approach, Reiner Kree and Taha Yasseri
    Lessons from BCA and Kinetic Theory
    Basic Monte Carlo model
    Variants and refinements

    Understanding Surface Patterning By Lattice Gas Models, Géza Ódor, Bertosz Liedke, and Karl-Heinz Heinig
    Mapping of surface adsorption or desorption onto lattice gases
    Numerical simulation for Kardar-Parisi-Zhang (KPZ)
    The surface diffusion model in 2D
    Pattern generation by competing inverse MH and KPZ processes
    KPZ in the presence of normal surface diffusion
    Conclusion and outlook

    Applications of Ion Induced Patterned Substrates in Plasmonics, Mukesh Ranjan, Thomas W. H. Oates, and Stefan Facsko
    Introduction: Demand of plasmonics
    Scaling laws to produce ripple templates for plasmonic application
    Metal film growth on rippled templates by PVD methods
    Plasmonic properties


    Tapobrata Som, Dinakar Kanjilal

    "This volume provides a remarkable overview of the status of the evolving field of ion-beam sputtering and its promising applications as a process tool for tailoring self-organized patterned properties and periodic nanoscale topographic features of surfaces. The topical scope includes the fundamental physics of sputtering, advanced simulations of pattern formation, and selected experimental applications. The list of authors includes distinguished authorities in this field, and the book will surely become a highly cited reference source, as future manufacturing technologies develop."
    —Dr. J. E. E. Baglin - IBM Almaden Research Center, USA

    "Since the inception of nanotechnology in the 1970s, low-energy ion-beam sputtering of solids has been expected to rank among the top routes to nanostructures fabrication. In spite of the development that this technique has since undergone, to date a thorough revision is under way on the basic mechanisms controlling the pattern formation process, key to a full control of its practical implications. This book provides a broad and timely view of the topic through contributions by world-class specialists, from atomistic principles and discrete theoretical modeling to experiments and technological applications. It will be invaluable for both practitioners in the field and anyone interested in nanoscience, to assess the degree to which current developments enable the harnessing of the technique that is up to the well-founded expectations."
    —Prof. Rodolfo Cuerno - Universidad Carlos III de Madrid, Spain

    "Bombarding a solid surface with a broad ion beam can produce a remarkable variety of self-assembled nanoscale patterns, including periodic height modulations or "ripples" and mounds arranged in hexagonal arrays of astonishing regularity. This book gives a comprehensive overview of our current understanding of these intriguing phenomena. Written by leaders in the field, it covers both theoretical and experimental work, and the topics range from the fundamental to the applied. This volume will be an invaluable reference for both researchers in the field and those who are new to the topic."
    —Prof. R. Mark Bradley - Colorado State University, USA