Nonthermal Plasma Chemistry and Physics: 1st Edition (Hardback) book cover

Nonthermal Plasma Chemistry and Physics

1st Edition

Edited by Jurgen Meichsner, Martin Schmidt, Ralf Schneider, Hans-Erich Wagner

CRC Press

564 pages | 242 B/W Illus.

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Hardback: 9781420059168
pub: 2012-11-13
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pub: 2012-11-13
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Description

In addition to introducing the basics of plasma physics, Nonthermal Plasma Chemistry and Physics is a comprehensive presentation of recent developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamentals of plasma chemical reactions and modeling, nonthermal plasma sources, relevant diagnostic techniques, and selected applications.

Elucidating interconnections and trends, the book focuses on basic principles and illustrations across a broad field of applications. Expert contributors address environmental aspects of plasma chemistry. The book also includes selected plasma conditions and specific applications in volume plasma chemistry and treatment of material surfaces such as plasma etching in microelectronics, chemical modification of polymer surfaces and deposition of functional thin films. Designed for students of plasma physics, Nonthermal Plasma Chemistry and Physics is a concise resource also for specialists in this and related fields of research.

Table of Contents

Introduction

Nonthermal Plasma Chemical Processes of General Interest

Physics of Nonthermal Plasmas

Nonthermal Plasma Chemical Reactors

Elementary Processes on Surfaces in Plasma–Wall Interaction

Plasma Diagnostics

Surface and Thin Film Analysis

Selected Applications

Modeling and Simulation

Trends and New Concepts

Subject Categories

BISAC Subject Codes/Headings:
SCI013050
SCIENCE / Chemistry / Physical & Theoretical
SCI055000
SCIENCE / Physics