Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology: 1st Edition (Hardback) book cover

Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

1st Edition

By Marc J. Madou

CRC Press

656 pages | 745 Color Illus.

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pub: 2011-06-13
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Description

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. 

Topics include:

  • Crystallography and the crystalline materials used in many semiconductor devices
  • Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
  • Single crystal Si properties that conspire to make Si so important
  • Optical properties of bulk 3D metals, insulators, and semiconductors
  • Effects of electron and photon confinement in lower dimensional structures
  • How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
  • Metamaterials and how they could make for perfect lenses, changing the photonic field forever
  • Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
  • Electromechanical and optical analytical processes in miniaturized components and systems 

The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.

Table of Contents

Historical Note: The Ascent of Silicon, MEMS, and NEMS

Crystallography

Introduction

Bravais Lattice, Unit Cells, and the Basis

Point Groups and Space Groups

Miller Indices

X-Ray Analysis

Reciprocal Space, Fourier Space, k-Space, or Momentum Space

Brillouin Zones

Nothing Is Perfect

Acknowledgments

Appendix 2A: Plane Wave

Equations

Questions

Further Reading

Reference

Quantum Mechanics and the Band Theory of Solids

Introduction

Classical Theory Starts Faltering

Quantum Mechanics to the Rescue

Beyond Schrödinger’s Equation

Silicon Single Crystal Is Still King

Introduction

Si Crystallography

Single-Crystal Structure and Conductivity

Single-Crystal Si Growth

Doping of Si

Oxidation of Silicon

Si-Based Electronic Devices

Physicochemical Properties of Si

Appendix 4A: Some Properties of Error Functions and Complementary Error Functions

Questions

Further Reading

References

Photonics

Introduction

The Nature of Light

Diffraction and Image Resolution

Refraction

Reflectance and Total Internal Reflectance

Light Polarization

Maxwell’s Equations

Beyond Maxwell

Optical Properties of Materials

Light Interaction with Small Particles

Comparing Photons with Electrons—Photonic Crystals

The μ-ε Quadrant and Metamaterials

Lasers

Questions

References

Fluidics

Introduction

Macroscale Laws for Fluid Flow

Breakdown of Continuum Theory in Fluidics

Forces at Interfaces

Mixing, Stirring, and Diffusion in Low Reynolds Number Fluids

Chemical Reactions in Microchambers—Microreactors

Fluid Propulsion

Electrowetting

Centrifugal Fluidic Platform—CD

Fluidics

Scaling in Analytical Separation

Equipment

Acknowledgments

Questions

Further Reading

References

Electrochemical and Optical Analytical Techniques

Introduction

Intermolecular Forces

Electrochemistry

Optical Spectroscopy

Comparison of Optical versus

Electrochemical Sensors

Questions

References

Subject Categories

BISAC Subject Codes/Headings:
SCI077000
SCIENCE / Solid State Physics
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC021000
TECHNOLOGY & ENGINEERING / Material Science
TEC027000
TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS