Microscopy of Semiconducting Materials: 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK, 1st Edition (e-Book) book cover

Microscopy of Semiconducting Materials

1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK, 1st Edition

Edited by A.G Cullis, R Beanland

CRC Press

774 pages

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pub: 2000-01-01
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Description

With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigat

Table of Contents

High resolution microscopy and microanalysis (10 papers). Dislocations and boundaries (9 papers). Self-organized and quantum domain structures (14 papers) . Epitaxy-growth phenomena (22 papers). Epitaxy-defect formation (16 papers). Epitaxy-wide band-gap nitrides (20 papers). Processed silicon and related materials (24 papers). Metallization, silicides and contacts (9 papers). Device studies and specimen preparation (7 papers). Scanning probe microscopy (6 papers). Advanced scanning electron and optical microscopy (20 papers).

Subject Categories

BISAC Subject Codes/Headings:
SCI055000
SCIENCE / Physics
TEC008010
TECHNOLOGY & ENGINEERING / Electronics / Circuits / General
TEC021000
TECHNOLOGY & ENGINEERING / Material Science